专利内容由知识产权出版社提供
专利名称：Displacement measuring apparatus发明人：Kon, Masahito,Taniguchi, Kayoko,Tamiya,
Hideaki,Onodera, Yasuhiko,Tsuchiya,Hideki,Kuroda, Akihiro
申请号：EP08012121.3申请日：20080704公开号：EP2020591A3公开日：20131009
专利附图：
摘要：Disclosed is a displacement measuring apparatus that includes a compositescale having a magnetic pattern and a diffraction grating each aligned in a direction of
measuring axis, and a detector head moving in a direction of measuring axis relative to thecomposite scale. The detector head has a magnetic detection unit detecting a magneticfield exerted by the magnetic pattern to generate first reproduced signals, a light sourceirradiating the diffraction grating with light, and an optical detection unit detecting thelight diffracted by the diffraction grating to generate second reproduced signals. Incomposite scale, the magnetic pattern and the diffraction grating are arranged such thata pitch of the first reproduced signals is larger than that of the second reproducedsignals.
申请人：Magnescale Co., Ltd.
地址：Shinagawa Intercity Tower A-18F 2-15-1 Konan Minatu-ku Tokyo 108-6018 JP
国籍：JP
代理机构：Müller - Hoffmann & Partner
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