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专利名称：Scheduling System and Method发明人：James Heskin,Mark Shepheard,Julia Lafoy申请号：US12181706申请日：20080729
公开号：US20080281454A1公开日：20081113
专利附图：
摘要：A method and apparatus for scheduling in a wafer fab. The method comprisingmeans for weighting inventories according to at least one of logpoints or reticle, andphotolithography units, means for scheduling one of said inventories on one of saidphotolightography units, wherein said one of said inventories has a maximal weighting
and means for eliminating any of said inventories not scheduled according to constraints.
申请人：James Heskin,Mark Shepheard,Julia Lafoy
地址：Richardson TX US,Garland TX US,Dallas TX US
国籍：US,US,US
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