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专利名称：Inertial Measurement Unit发明人：Ernest Post,Neil Gershenfeld申请号：US13023537申请日：20110208
公开号：US20110192227A1公开日：20110811
专利附图：
摘要：In exemplary embodiments of this invention, an inertial measurement unit (IMU)includes a cantilevered proof mass and electrostatic drive. The electrostatic drive putsthe proof mass into a controlled trajectory in which it oscillates rapidly, for example, byvibrating back and forth in a plane or traveling in a circular or elliptical orbit. The IMU
detects lateral or angular acceleration of the IMU, by measuring the perturbations of theproof mass trajectory from the expected motion in a fixed, non-rotating inertial frame. Inexemplary embodiments of this invention, the proof mass position and motion aremeasured by methods of differential potential measurement (with constant slopevoltage), differential displacement current measurement, or phase-sensitive orsynchronous detection of motion.
申请人：Ernest Post,Neil Gershenfeld
地址：Cambridge MA US,Somerville MA US
国籍：US,US
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