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专利名称：Film thickness detection device发明人：Wuchang QI申请号：US16099443申请日：20160923
公开号：US20190145751A1公开日：20190516
专利附图：
摘要：Disclosed is a film thickness detection device, including a common unit () and adetection unit (); the common unit () comprises at least one common electrode (); thedetection unit () comprises at least one sensor chip () and a signal processing unit (); thesensor chips () are opposite to the common unit () in a first direction and are arranged at
intervals; the spaces between the common unit () and the sensor chips () form a transportchannel for a to-be-tested film; each of the sensor chips () comprises at least one row ofmultiple detection electrodes () arranged along a second direction; the second directionis perpendicular to a moving direction of the to-be-tested film; the first direction isperpendicular to a first plane; the first plane is parallel to the second direction; thesensor chips () are configured to induce electrical signals on the common electrodes ()and output the electrical signals; and the signal processing unit () is electrically connectedwith the sensor chips (), processes the electrical signals output by the sensor chips () andoutputs the electrical signals.
申请人：WEIHAI HUALING OPTO-ELECTRONICS CO., LTD.
地址：Shandong CN
国籍：CN
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