专利内容由知识产权出版社提供
专利名称：SUPPORT FOR A COMPONENT OF AN
OPTICAL DEVICE
发明人：Thomas Bischoff,Joachim Feucht,Jochen
Wieland,Stefan Mueller
申请号：US14929614申请日：20151102
公开号：US20160124315A1公开日：20160505
专利附图：
摘要：The disclosure provides an arrangement for an optical device including acomponent of the optical device and a support structure supporting the component. The
support structure includes at least one locking device connected to the component andincluding a first fixation device and an associated second fixation device. The first fixationdevice and the second fixation device are adapted to be, in a movable state, movable withrespect to each other along a first degree of freedom and a second degree of freedominto a final position. The first fixation device and the second fixation device are furtheradapted to be, in a locked state, fixed in the final position by at least one locking devicecontacting the first fixation device and the second fixation device. In the movable state,the first fixation device and the second fixation device are movable, up to the finalposition, in a manner free from a mutual pre-stress resulting from a restoring forceexerted by at least a part of one of the first fixation device and the second fixation device.
申请人：Carl Zeiss SMT GmbH
地址：Oberkochen DE
国籍：DE
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