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专利名称：Interferometer and method of calibrating
the interferometer
发明人：Kawasaki, Kazuhiko,Suzuki, Yoshimasa,Sesko,
David W
申请号：EP06113217.1申请日：20060427公开号：EP1717546A1公开日：20061102
专利附图：
摘要：An interferometer comprises a wavelength-variable light source. A referencelight and a measurement light are synthesized, and the synthesized light is split into a
plurality of split lights. A certain phase difference is provided between the split lightsthrough phase shifting optical members. A plurality of interference fringe images formedby the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes andthe amounts of phase shift of the interference fringes formed by the plurality of splitlights are calculated, based on interference fringe intensities of the imaged interferencefringes, which are obtained by disposing a calibrating substrate instead of the measuringobject, varying the wavelength of the emitted light to plural values, and operating theimaging unit to capture a plurality of images of interference fringes obtained by the splitlights.
申请人：MITUTOYO CORPORATION
地址：20-1, Sakado 1-chome, Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
国籍：JP
代理机构：Skone James, Robert Edmund
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