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专利名称：Charged particle beam writing apparatus发明人：Tetsurou Nishiyama申请号：US12714735申请日：20100301公开号：US08148698B2公开日：20120403
专利附图：
摘要：A blanking deflector is of the coaxial type and includes a rod-like inner
electrode and a cylindrical outer electrode enclosing the inner electrode such that an airgap through which the charged particle beam B passes is formed between the inner andouter electrodes and . The inner electrode and the outer electrode are formed by
forming electrode films and of a metal over the surfaces of nonconducting basematerials and , respectively, by vacuum deposition or sputtering. Further, each of theshaping deflector and the main deflector and sub-deflector for beam scanning includes aplurality of pairs of opposite electrodes, and each opposite electrode is formed byforming an electrode film of a metal over the surface of a nonconducting base materialby vacuum deposition or sputtering.
申请人：Tetsurou Nishiyama
地址：Shizuoka JP
国籍：JP
代理机构：Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
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