专利内容由知识产权出版社提供
专利名称：Coating for reflective optical components发明人：Henry A. Hill申请号：US111102申请日：20050725
公开号：US20060001888A1公开日：20060105
专利附图：
摘要：An optical component has a coating including one or more layers at eachreflecting surface. The coating causes the optical component to have polarizationeigenstates that are substantially linear and to have the properties of a half-wave plate.The coated optical component can be used in interferometry and microlithography
system.
申请人：Henry A. Hill
地址：Tucson AZ US
国籍：US
更多信息请下载全文后查看
